水晶管
石英プレート
石英ロッド
光学アプリケーション
半導体産業
研究室および化学用途
A quartz boat carrier is a boat-shaped tray or support structure primarily made from quartz. Due to the excellent high-temperature resistance, corrosion resistance, and high light transmission properties of quartz, quartz boat carriers are widely used in the photovoltaic and semiconductor industries. They are primarily used for carrying silicon wafers, battery cells, or other materials requiring processing, providing support and transport during processes such as diffusion, etching, and cleaning.
| 物件内容 | 資産価値 |
|---|---|
| 二酸化ケイ素 | 99.99% |
| 密度 | 2.2×10³ kg/cm³ |
| 硬度 | 5.5 - 6.5 モース硬度 570 KHN 100 |
| 引張強度 | 4.8×10⁷ Pa (N/mm2) (7000 psi) |
| 圧縮強度 | >1.1×10⁹Pa (160,000 psi) |
| 熱膨張係数 | 5.5×10-⁷cm/cm-°C (20°C-320°C) |
| 熱伝導率 | 1.4 W/m-°C |
| 比熱 | 670 J/kg-°C |
| 軟化点 | 1730度C（3146度F） |
| アニーリングポイント | 1210度C（2210度F） |
| ストレイン・ポイント | 1120度C（2048度F） |
| 作業温度 | 1200°C |
| 電気抵抗率 | 7×10⁷Ωcm (350°C) |
| サイズ | カスタマイズ |
| ロゴ | カスタマイズされたロゴ |
高温耐性
Quartz has a melting point of 1713°C, enabling quartz boat carriers to maintain stability in high-temperature environments and meeting the demands of high-temperature processes in the photovoltaic and semiconductor industries.
耐食性
Quartz possesses excellent resistance to most acids, bases, and organic solvents, ensuring that quartz boat carriers are not easily damaged during chemical processes.
High Light Transmission
While quartz’s high light transmission is often utilized in optical applications, in quartz boat carriers, this property mainly manifests in its controlled absorption and reflection of light, contributing to the stability of processing environments.
アプリケーション・シナリオ
Photovoltaic Industry
In the production of photovoltaic cells, quartz boat carriers are used to support solar cells during various processing steps such as diffusion, etching, and cleaning.
半導体産業
In the production of semiconductor chips, quartz boat carriers are used to support silicon wafers during similar processing steps. Additionally, they are employed in heat treatment and deposition processes for semiconductor materials.
A quartz boat carrier is a device used to carry and support quartz boats, often in semiconductor manufacturing equipment, particularly as a key support component in diffusion furnaces in the photovoltaic industry.
Quartz boat carriers are primarily used in semiconductor manufacturing, the photovoltaic industry, and other sectors that require processing silicon wafers or other thin materials. In semiconductor manufacturing, they are used in wafer processing, heat treatment, and chemical reaction steps.
Quartz boat carriers have a relatively short service life, typically 3-6 months, whereas silicon carbide boat carriers have a longer service life, potentially reaching 5 years or more. Silicon carbide boat carriers are gradually replacing quartz boat carriers in certain conditions due to their superior high-temperature strength and long-lasting durability.
よくある質問
石英ガラスは硬くて脆い材料で、物理的、化学的性質が優れ、機械的硬度が非常に高く、電気絶縁性がよく、高温と耐食性に優れ、遅延性能が低く安定で、光透過性がよい。半導体、光学、電気、化学、航空宇宙、自動車などの分野で広く使用されている。硬くて脆い材料は加工が難しく、多くの分野で刃先の倒れが小さく、材料ロスが少なく、断面粗さが小さく、切断厚さ範囲が広い切断加工が急務となっている。石英ガラスの伝統的な切断方法は機械的切断、すなわち砥石切断である。非伝統的な切断方法には、ウォータージェット切断、電気化学放電ワイヤー切断、連続レーザー切断などがある。機械的切断はコストが低いが、ホイールと材料が接触するため工具の摩耗が大きく、材料が工具によって汚染されやすい。石英ガラスはエッジ崩壊、マイクロクラック、残留応力が発生しやすく、材料の強度や性能に影響する！曲線切断が難しく、研削や研磨などの後処理が必要。レーザー切断は材料に直接触れないため、接触応力がなく、複雑な曲線切断が可能です。ピコ秒レーザーは、スポット径が小さい、精度が高い、材料との作用時間が短い、作用面積が小さいなどの利点があり、硬くて脆い材料の加工に適しています。
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