Quartz Tube
Quartz Plate
Quartz Rod
Optical Applications
Semiconductor Industry
Laboratory and Chemical Applications
Engineered for precision and purity in high-temperature applications, our custom quartz boats with lids are the ultimate solution for furnace processing, wafer handling, and material annealing. Crafted from ultra-high purity fused quartz, they offer exceptional resistance to extreme temperatures, chemical corrosion, and thermal shock. The included anti-slip lids ensure sample integrity and prevent contamination during critical processes. Fully customizable in shape, size, and lid style (round or flat bottom), these boats are designed to seamlessly integrate into your specific furnace or process equipment.
Remarks：
- ayment method: By wire transfer or advance payment, depending on the quantity of the order.
- Delivery time: According to the order quantity.
- Transportation method: Sea freight or air freight, depending on the customer.
| Length(mm) | Width(mm) | Height(mm) | Length(in) | Width(in) | Height(in) |
|---|---|---|---|---|---|
| 50mm | 10mm | 5mm | 1.97" | 0.39" | 0.20” |
| 50mm | 15mm | 7.5mm | 1.97" | 0.59" | 0.30” |
| 50mm | 20mm | 10mm | 1.97" | 0.79" | 0.39” |
| 50mm | 25mm | 12.5mm | 1.97" | 0.98" | 0.49” |
| 50mm | 30mm | 15mm | 1.97" | 1.18" | 0.59” |
| 50mm | 40mm | 20mm | 1.97" | 1.57" | 0.79” |
| 50mm | 50mm | 25mm | 1.97" | 1.97" | 0.98” |
| 60mm | 30mm | 15mm | 2.36" | 1.18" | 0.59” |
| 80mm | 30mm | 15mm | 3.15" | 1.18" | 0.59” |
| 100mm | 10mm | 5mm | 3.94" | 0.39" | 0.20” |
| 100mm | 15mm | 7.5mm | 3.94" | 0.59" | 0.30” |
| 100mm | 20mm | 10mm | 3.94" | 0.79" | 0.39” |
| 100mm | 25mm | 12.5mm | 3.94" | 0.98" | 0.49” |
| 100mm | 30mm | 15mm | 3.94" | 1.18" | 0.59” |
| 100mm | 35mm | 17.5mm | 3.94" | 1.38" | 0.69” |
| 100mm | 40mm | 20mm | 3.94" | 1.57" | 0.79” |
| 100mm | 45mm | 22.5mm | 3.94" | 1.77" | 0.89” |
| 100mm | 50mm | 25mm | 3.94" | 1.97" | 0.98” |
| 100mm | 60mm | 30mm | 3.94" | 2.36" | 1.18” |
| 100mm | 70mm | 35mm | 3.94" | 2.76" | 1.38” |
| 100mm | 80mm | 40mm | 3.94" | 3.15" | 1.57” |
| 150mm | 40mm | 20mm | 5.91" | 1.57" | 0.79” |
| 150mm | 50mm | 25mm | 5.91" | 1.97" | 0.98” |
| 150mm | 60mm | 30mm | 5.91" | 2.36" | 1.18” |
| 150mm | 70mm | 35mm | 5.91" | 2.76" | 1.38” |
| 150mm | 80mm | 40mm | 5.91" | 3.15" | 1.57” |
| 200mm | 20mm | 10mm | 7.87" | 0.79" | 0.39” |
| 200mm | 25mm | 12.5mm | 7.87" | 0.98" | 0.49” |
| 200mm | 30mm | 15mm | 7.87" | 1.18" | 0.59” |
| 200mm | 40mm | 20mm | 7.87" | 1.57" | 0.79” |
| 200mm | 50mm | 25mm | 7.87" | 1.97" | 0.98” |
| Property Content | Property Values |
|---|---|
| SiO2 | 99.99% |
| Density | 2.2×10³ kg/cm³ |
| Hardness | 5.5 - 6.5 Mohs' Scale 570 KHN 100 |
| Tensile Strength | 4.8×10⁷ Pa (N/mm2) (7000 psi) |
| Compression Strength | >1.1×10⁹ Pa (160,000 psi) |
| Coefficient of Thermal Expansion | 5.5×10⁻⁷ cm/cm·°C (20°C-320°C) |
| Thermal Conductivity | 1.4 W/m·°C |
| Specific Heat | 670 J/kg·°C |
| Softening Point | 1730°C (3146°F) |
| Annealing Point | 1210°C (2210°F) |
| Strain Point | 1120°C (2048°F) |
| Work Temperature | 1200°C (2192°F) |
| Electrical Resistivity | 7×10⁷ ohm cm (350°C) |
| Size | Customized |
| Logo | Customized Logo Accept |
Superior High-Temperature Performance & Durability
Engineered from robust, flawless fused quartz, these boats withstand extreme temperatures common in diffusion, annealing, and oxidation furnaces without deformation or material degradation. Their exceptional thermal shock resistance ensures longevity and reliable performance even during rapid heating and cooling cycles.
Unmatched Sample Protection & Purity
The precisely fitted, anti-slip lid ensures a sealed environment, effectively preventing airborne particulate contamination and cross-contamination between samples during high-temperature processing. Combined with the ultra-high purity of fused quartz, this guarantees the integrity of your sensitive materials, critical for semiconductor and high-purity material applications.
Optimized for Efficient Process Flow
The unique “boat” shape is specifically designed for easy loading, unloading, and uniform placement within furnace tubes, maximizing throughput and thermal consistency for your batch processes. The integrated lid design further streamlines handling while maintaining process control.
Fully Customizable to Your Exact Needs
Beyond standard sizes, our quartz boats are fully customizable in dimensions, bottom profile (flat or round), and lid features. This bespoke manufacturing ensures a perfect fit for your specific furnace system, wafer size, or material handling requirements, providing a tailored solution that optimizes your unique production or research process.
Application Scenario
Semiconductor Wafer Diffusion & Oxidation Furnaces
These quartz boats are indispensable for carrying silicon wafers into high-temperature diffusion and oxidation furnaces. The precision-engineered design ensures proper wafer spacing and uniform gas flow, while the accompanying lid helps maintain a clean, controlled atmosphere within the furnace tube, preventing particle contamination and ensuring the integrity of critical doping and oxide layers.
High-Temperature Material Annealing & Sintering
In advanced materials research and production, these boats serve as ideal containers for annealing powders, ceramics, or metallic samples at extreme temperatures. The high-purity quartz prevents any reaction with the sample, and the lid helps to minimize material loss through evaporation or maintain specific atmospheric conditions during processes like sintering or crystal growth.
Gravimetric Analysis & Residue Determination
For analytical laboratories, these lidded quartz boats are used for precise gravimetric analysis, particularly for determining the ash content or non-volatile residue of various materials (e.g., polymers, biological samples, coal). The lid helps contain any spattering during initial heating and prevents re-absorption of moisture or airborne contamination after heating, ensuring highly accurate and reproducible measurements.
Specialty Material Evaporation Sources in PVD
In physical vapor deposition (PVD) systems, these boats can be employed as evaporation sources for high-purity materials, especially those that require a clean, non-reactive container. The boat’s shape allows for efficient heating of the source material for thin film deposition, and while the lid might be removed during evaporation, it’s crucial for pre-process handling and ensuring the source material remains uncontaminated.
Handle with care
Quartz glass products are made from valuable materials and must be handled gently to avoid collisions and falls.
Regular maintenance
The maintenance of quartz tubes must be performed regularly to ensure their long-term stable performance. Regularly check the connections, fixings, and mechanical vibrations of the quartz tubes to prevent abnormalities. The exterior of the quartz tubes is prone to contamination from dust and moisture, so they should be cleaned regularly.
Storage environmen
When storing quartz tubes, care should be taken to avoid exposure to mechanical vibrations, shocks, and excessively high temperatures. They should be kept in a dry, cool, and well-ventilated place, avoiding direct sunlight and high-temperature environments.
Absolutely. Our core strength lies in custom fabrication. We understand that furnace tube diameters, process requirements, and wafer/sample sizes vary significantly. We can fully customize the length, width, height, bottom profile (flat or rounded), and even the handle/ring design of your quartz boat to ensure a perfect fit within your specific furnace or process equipment. Simply provide us with your dimensions or technical drawing, and our team will engineer a tailored solution.
Quartz offers distinct advantages for many demanding applications. Unlike graphite, quartz is highly resistant to oxidation and does not outgas impurities, making it ideal for processes requiring ultra-high purity, such as semiconductor manufacturing. Compared to ceramics, quartz has superior thermal shock resistance, allowing for faster heating and cooling rates without cracking. Its high chemical inertness also prevents reactions with most acids (except HF) and eliminates material leaching, ensuring a clean, contaminant-free environment for your samples.
The “anti-slip lid” provides multiple critical benefits, especially in high-temperature furnace applications. Firstly, it significantly reduces the risk of particulate contamination from the ambient environment or other parts of the furnace, protecting your sensitive samples. Secondly, it helps to maintain a stable and consistent atmosphere directly above your samples, which is crucial for processes like diffusion or oxidation. Lastly, its secure fit minimizes sample loss due to evaporation or spattering, ensuring maximum material recovery and process control.
Laser Drilling of Quartz
Threaded Quartz Tube
External Thread on Quartz Tube
Internal Threaded Quartz Tube
Quartz Tube Slotted
Window on Quartz Tube
Angled Cut Quartz Tube
Quartz Tile
Quartz Tube with Window
Frequently asked questions
We specialize in the end-to-end manufacturing of high-purity quartz glass components. Our core product lines include:
Quartz Tubing & Rods: A wide range of diameters and specifications.
Quartz Plates & Discs: Precision-cut and polished for optical and industrial use.
Quartz Labware: A full suite of standard and custom glassware, including beakers, flasks, and boats.
Semiconductor-Grade Quartz: High-purity components like process tubes and carriers for semiconductor fabrication.
Custom Fabricated Components: We can produce complex parts tailored to your unique designs and specifications.
Yes. Custom fabrication is at the core of our business. With over a decade of specialized experience, we partner with companies to provide expert OEM/ODM services. Our capabilities include welding, grinding, drilling, polishing, bending, and other precision processing techniques to create components that meet your exact requirements.
Quality is paramount in our manufacturing process. We are an ISO 9001:2015 certified manufacturer, ensuring that our processes meet international quality management standards.Our products also undergo rigorous SGS testing for purity and performance. We use high-purity raw materials (up to 99.998% SiO2) to produce fused quartz and fused silica products with exceptional thermal stability, high-temperature resistance, and chemical inertness.
We've streamlined our process to be as efficient as possible:
Submit Your RFQ: Send us your technical drawings, specifications, and requirements via our website contact form or email.
Rapid Response: You can expect an initial response within minutes and detailed communication within half an hour.
Design & Proposal: We will deliver a detailed design proposal and a competitive quote within 24 hours.
Prototyping & Production: Upon approval, we move swiftly from prototyping to full-scale production to meet your deadlines.
Partnering with Aoxin Quartz offers several key advantages:
Proven Expertise: With 10+ years in the industry, we have the technical knowledge to tackle complex challenges.
One-Stop Solution: We manage the entire production process, from sourcing high-purity raw materials to fabricating and finishing complex components.
Competitive Value: Located in a major quartz production hub, we leverage an efficient supply chain and advanced manufacturing to offer exceptional quality at a competitive price point.
Dedicated Partnership: Over 90% of our clients become long-term partners. We are committed to your success through responsive service, reliable quality, and innovative solutions.
