Quartz Tube
Quartz Plate
Quartz Rod
Optical Applications
Semiconductor Industry
Laboratory and Chemical Applications
Our high-purity quartz boats are specifically designed as substrate holders for demanding annealing and Chemical Vapor Deposition (CVD) processes. Crafted from 99.99% pure quartz, these boats ensure non-contamination and stable performance at operating temperatures up to 1200°C. Each boat is precisely sized (50mm x 12mm x 38mm) to securely hold up to five 8 to 10 mm substrates with 0.5mm thickness, fitting seamlessly into standard 2″ O.D. tube furnaces (e.g., GSL-1100X and OTF-1200X-S). Ideal for semiconductor manufacturing and advanced materials research requiring precise thermal treatment.
Remarks：
- ayment method: By wire transfer or advance payment, depending on the quantity of the order.
- Delivery time: According to the order quantity.
- Transportation method: Sea freight or air freight, depending on the customer.
| Property Content | Property Values |
|---|---|
| SiO2 | 99.99% |
| Density | 2.2×10³ kg/cm³ |
| Hardness | 5.5 - 6.5 Mohs' Scale 570 KHN 100 |
| Tensile Strength | 4.8×10⁷ Pa (N/mm2) (7000 psi) |
| Compression Strength | >1.1×10⁹ Pa (160,000 psi) |
| Coefficient of Thermal Expansion | 5.5×10⁻⁷ cm/cm·°C (20°C-320°C) |
| Thermal Conductivity | 1.4 W/m·°C |
| Specific Heat | 670 J/kg·°C |
| Softening Point | 1730°C (3146°F) |
| Annealing Point | 1210°C (2210°F) |
| Strain Point | 1120°C (2048°F) |
| Work Temperature | 1200°C (2192°F) |
| Electrical Resistivity | 7×10⁷ ohm cm (350°C) |
| Size | Customized |
| Logo | Customized Logo Accept |
Exceptional High-Temperature Stability
Designed to operate at working temperatures up to 1200°C (with a soften point around 1730°C), this quartz boat maintains its structural integrity and performance even under extreme thermal conditions within various furnace types.
Ultra-High Purity for Contamination-Sensitive Processes
Made from 99.99% pure quartz, this boat ensures an inert environment, preventing any contamination of sensitive substrates during high-temperature annealing or CVD processes, critical for semiconductor and advanced materials industries.
Precision Substrate Holding & Positioning
Engineered to precisely hold up to five 8 to 10 mm substrates with 0.5mm thickness, ensuring accurate and consistent positioning during thermal treatments. This precise design is vital for uniform processing results.
Optimized for Annealing & CVD Applications
Specifically designed for annealing and Chemical Vapor Deposition (CVD) processes, this boat fits seamlessly into standard 2″ O.D. tube furnaces (like GSL-1100X and OTF-1200X-S), providing a dedicated and efficient solution for high-precision material processing.
Application Scenario
Semiconductor Wafer & Substrate Processing
Primarily used in diffusion, annealing, and Chemical Vapor Deposition (CVD) furnaces for the precise thermal treatment of silicon wafers, compound semiconductor substrates, or other sensitive materials, ensuring uniform processing and preventing contamination.
Thin Film Deposition (PVD/CVD Support)
Serves as a crucial substrate carrier for various thin film deposition techniques where high temperatures and an inert environment are required, facilitating uniform coating and desired material properties on 8-10mm substrates.
Advanced Materials Research & Development
Employed in R&D laboratories for the synthesis, heat treatment, or characterization of novel materials, ceramics, or nanomaterials, especially when working with small, precisely sized samples that require high-purity and high-temperature processing.
Photovoltaic & Optical Substrate Annealing
Utilized in the annealing processes for small photovoltaic cells or optical components, where high-temperature uniformity and a contamination-free environment are critical for optimizing efficiency and optical performance.
Handle with care
Quartz glass products are made from valuable materials and must be handled gently to avoid collisions and falls.
Regular maintenance
The maintenance of quartz tubes must be performed regularly to ensure their long-term stable performance. Regularly check the connections, fixings, and mechanical vibrations of the quartz tubes to prevent abnormalities. The exterior of the quartz tubes is prone to contamination from dust and moisture, so they should be cleaned regularly.
Storage environmen
When storing quartz tubes, care should be taken to avoid exposure to mechanical vibrations, shocks, and excessively high temperatures. They should be kept in a dry, cool, and well-ventilated place, avoiding direct sunlight and high-temperature environments.
This quartz boat is precisely designed to hold 8 to 10 mm substrates, typically with a thickness of 0.5mm. It has slots to securely accommodate a total of five such substrates, making it ideal for small-scale or precision processing of semiconductor wafers, optical components, or advanced material samples.
This quartz boat is specifically designed to fit into 2″ O.D. (Outer Diameter) tube furnaces. Examples of compatible models include GSL-1100X and OTF-1200X-S. While it’s designed for common furnace types, it’s always recommended to verify your furnace tube’s inner diameter to ensure a proper fit and optimal performance.
For sensitive high-purity processes like those in semiconductor manufacturing, the quartz boat should be cleaned thoroughly with appropriate cleaning agents (e.g., dilute acids or specialized quartz cleaning solutions) followed by extensive rinsing with deionized water. Avoid abrasive cleaning tools to prevent scratching. Regular inspection for any signs of wear or contamination is also recommended to maintain its performance and extend its lifespan.
Laser Drilling of Quartz
Threaded Quartz Tube
External Thread on Quartz Tube
Internal Threaded Quartz Tube
Quartz Tube Slotted
Window on Quartz Tube
Angled Cut Quartz Tube
Quartz Tile
Quartz Tube with Window
Frequently asked questions
We specialize in the end-to-end manufacturing of high-purity quartz glass components. Our core product lines include:
Quartz Tubing & Rods: A wide range of diameters and specifications.
Quartz Plates & Discs: Precision-cut and polished for optical and industrial use.
Quartz Labware: A full suite of standard and custom glassware, including beakers, flasks, and boats.
Semiconductor-Grade Quartz: High-purity components like process tubes and carriers for semiconductor fabrication.
Custom Fabricated Components: We can produce complex parts tailored to your unique designs and specifications.
Yes. Custom fabrication is at the core of our business. With over a decade of specialized experience, we partner with companies to provide expert OEM/ODM services. Our capabilities include welding, grinding, drilling, polishing, bending, and other precision processing techniques to create components that meet your exact requirements.
Quality is paramount in our manufacturing process. We are an ISO 9001:2015 certified manufacturer, ensuring that our processes meet international quality management standards.Our products also undergo rigorous SGS testing for purity and performance. We use high-purity raw materials (up to 99.998% SiO2) to produce fused quartz and fused silica products with exceptional thermal stability, high-temperature resistance, and chemical inertness.
We've streamlined our process to be as efficient as possible:
Submit Your RFQ: Send us your technical drawings, specifications, and requirements via our website contact form or email.
Rapid Response: You can expect an initial response within minutes and detailed communication within half an hour.
Design & Proposal: We will deliver a detailed design proposal and a competitive quote within 24 hours.
Prototyping & Production: Upon approval, we move swiftly from prototyping to full-scale production to meet your deadlines.
Partnering with Aoxin Quartz offers several key advantages:
Proven Expertise: With 10+ years in the industry, we have the technical knowledge to tackle complex challenges.
One-Stop Solution: We manage the entire production process, from sourcing high-purity raw materials to fabricating and finishing complex components.
Competitive Value: Located in a major quartz production hub, we leverage an efficient supply chain and advanced manufacturing to offer exceptional quality at a competitive price point.
Dedicated Partnership: Over 90% of our clients become long-term partners. We are committed to your success through responsive service, reliable quality, and innovative solutions.
