Quartz Tube
Quartz Plate
Quartz Rod
Optical Applications
Semiconductor Industry
Laboratory and Chemical Applications
Our high-purity quartz wafer cleaning tanks and wet processing baths are meticulously engineered for the most critical applications in semiconductor, photovoltaic, and microelectronics fabrication. Crafted from ultra-pure fused silica, these tanks offer unparalleled chemical resistance to strong acids, bases, and aggressive cleaning solutions, ensuring zero metallic or particulate contamination of your sensitive wafers and components. Their robust, transparent design allows for precise process monitoring and easy cleaning, providing a reliable and contamination-free environment for etching, rinsing, and RCA cleaning processes. Available with or without integrated racks and fully customizable to meet specific wafer sizes, process volumes, and equipment requirements.
Remarks：
- ayment method: By wire transfer or advance payment, depending on the quantity of the order.
- Delivery time: According to the order quantity.
- Transportation method: Sea freight or air freight, depending on the customer.
| Property Content | Property Values |
|---|---|
| SiO2 | 99.99% |
| Density | 2.2×10³ kg/cm³ |
| Hardness | 5.5 - 6.5 Mohs' Scale 570 KHN 100 |
| Tensile Strength | 4.8×10⁷ Pa (N/mm2) (7000 psi) |
| Compression Strength | >1.1×10⁹ Pa (160,000 psi) |
| Coefficient of Thermal Expansion | 5.5×10⁻⁷ cm/cm·°C (20°C-320°C) |
| Thermal Conductivity | 1.4 W/m·°C |
| Specific Heat | 670 J/kg·°C |
| Softening Point | 1730°C (3146°F) |
| Annealing Point | 1210°C (2210°F) |
| Strain Point | 1120°C (2048°F) |
| Work Temperature | 1200°C (2192°F) |
| Electrical Resistivity | 7×10⁷ ohm cm (350°C) |
| Size | Customized |
| Logo | Customized Logo Accept |
Ultra-High Purity & Zero Contamination
Crafted from 99.99% pure fused silica, these tanks ensure virtually no leaching of metallic ions or particulate contamination into process chemicals. This is absolutely critical for achieving the stringent cleanliness requirements in semiconductor, microelectronics, and advanced materials fabrication.
Exceptional Chemical Corrosion Resistance
Quartz exhibits superior inertness to a wide range of aggressive acids, strong bases, and organic solvents commonly used in wafer cleaning, etching, and wet processing. This extends the lifespan of the tank, reduces replacement costs, and ensures process consistency.
Optimal Process Visibility & Control
The inherent transparency of quartz allows for clear visual monitoring of the cleaning or etching process, enabling real-time observation of chemical reactions and fluid dynamics. This aids in process optimization and quality control, ensuring precise and reproducible results.
Robust Construction & Customizability
Built with strong, durable quartz glass, these tanks offer excellent mechanical strength and thermal stability. Crucially, they are fully customizable in terms of dimensions, volume, internal rack configurations (for wafer holding), and port designs, allowing for seamless integration into existing wet benches and tailored solutions for specific process needs.
Application Scenario
Semiconductor Wafer Cleaning (e.g., RCA Cleaning)
Indispensable for performing various stages of wafer cleaning, including the industry-standard RCA (Radio Corporation of America) clean, where multiple tanks are used with specific chemical solutions (e.g., SC-1, SC-2, diluted HF) to remove organic, metallic, and particulate contaminants from silicon wafers.
Chemical Etching & Surface Preparation
Used for precision etching of semiconductor wafers, glass substrates, or other delicate materials, where controlled removal of material or surface modification is achieved using highly corrosive etchants. The quartz tank ensures uniform etching and no contamination.
Photovoltaic (Solar Cell) Manufacturing
Employed in the wet processing steps of solar cell production, such as texturing, cleaning, and chemical polishing of silicon wafers, to enhance efficiency and prepare the surface for subsequent layers.
MEMS & Microfluidics Fabrication
Crucial for the cleaning and wet etching processes involved in the manufacturing of Micro-Electro-Mechanical Systems (MEMS) and microfluidic devices, where extremely small features and high material purity are required.
Handle with care
Quartz glass products are made from valuable materials and must be handled gently to avoid collisions and falls.
Regular maintenance
The maintenance of quartz tubes must be performed regularly to ensure their long-term stable performance. Regularly check the connections, fixings, and mechanical vibrations of the quartz tubes to prevent abnormalities. The exterior of the quartz tubes is prone to contamination from dust and moisture, so they should be cleaned regularly.
Storage environmen
When storing quartz tubes, care should be taken to avoid exposure to mechanical vibrations, shocks, and excessively high temperatures. They should be kept in a dry, cool, and well-ventilated place, avoiding direct sunlight and high-temperature environments.
Yes, high-purity quartz offers exceptional chemical resistance to most concentrated acids (including nitric, sulfuric, hydrochloric acids) and strong bases commonly used in semiconductor and industrial cleaning processes. This inertness ensures the tank’s longevity and prevents contamination of your valuable chemicals and wafers. However, prolonged exposure to hot concentrated hydrofluoric acid (HF) or hot concentrated phosphoric acid can lead to etching over time.
Due to quartz’s smooth, non-porous surface, these tanks are relatively easy to clean. Regular rinsing with deionized (DI) water after use is recommended. For more stubborn residues, mild detergents, or appropriate dilute cleaning solutions can be used. Avoid abrasive brushes or cleaners that could scratch the surface. Proper handling to prevent impact or thermal shock (though quartz has excellent resistance) will ensure maximum lifespan.
The design varies; some tanks are integrated systems with fixed internal racks, while others are designed as baths where separate, removable quartz racks can be inserted. We offer both types, and importantly, our products are highly customizable. If you have specific wafer sizes, processing volumes, or unique rack configurations in mind, we can design and fabricate a system that precisely meets your requirements, including removable or specialized rack designs.
Laser Drilling of Quartz
Threaded Quartz Tube
External Thread on Quartz Tube
Internal Threaded Quartz Tube
Quartz Tube Slotted
Window on Quartz Tube
Angled Cut Quartz Tube
Quartz Tile
Quartz Tube with Window
Frequently asked questions
We specialize in the end-to-end manufacturing of high-purity quartz glass components. Our core product lines include:
Quartz Tubing & Rods: A wide range of diameters and specifications.
Quartz Plates & Discs: Precision-cut and polished for optical and industrial use.
Quartz Labware: A full suite of standard and custom glassware, including beakers, flasks, and boats.
Semiconductor-Grade Quartz: High-purity components like process tubes and carriers for semiconductor fabrication.
Custom Fabricated Components: We can produce complex parts tailored to your unique designs and specifications.
Yes. Custom fabrication is at the core of our business. With over a decade of specialized experience, we partner with companies to provide expert OEM/ODM services. Our capabilities include welding, grinding, drilling, polishing, bending, and other precision processing techniques to create components that meet your exact requirements.
Quality is paramount in our manufacturing process. We are an ISO 9001:2015 certified manufacturer, ensuring that our processes meet international quality management standards.Our products also undergo rigorous SGS testing for purity and performance. We use high-purity raw materials (up to 99.998% SiO2) to produce fused quartz and fused silica products with exceptional thermal stability, high-temperature resistance, and chemical inertness.
We've streamlined our process to be as efficient as possible:
Submit Your RFQ: Send us your technical drawings, specifications, and requirements via our website contact form or email.
Rapid Response: You can expect an initial response within minutes and detailed communication within half an hour.
Design & Proposal: We will deliver a detailed design proposal and a competitive quote within 24 hours.
Prototyping & Production: Upon approval, we move swiftly from prototyping to full-scale production to meet your deadlines.
Partnering with Aoxin Quartz offers several key advantages:
Proven Expertise: With 10+ years in the industry, we have the technical knowledge to tackle complex challenges.
One-Stop Solution: We manage the entire production process, from sourcing high-purity raw materials to fabricating and finishing complex components.
Competitive Value: Located in a major quartz production hub, we leverage an efficient supply chain and advanced manufacturing to offer exceptional quality at a competitive price point.
Dedicated Partnership: Over 90% of our clients become long-term partners. We are committed to your success through responsive service, reliable quality, and innovative solutions.
