Quartz Tube
Quartz Plate
Quartz Rod
Optical Applications
Semiconductor Industry
Laboratory and Chemical Applications
Our high-purity quartz wafer cleaning racks and carriers are essential for advanced semiconductor manufacturing. Crafted from premium fused silica, these robust components offer exceptional resistance to corrosive chemicals used in wet etching and cleaning processes, along with superior temperature stability and ultra-low particle generation. Designed to securely hold silicon wafers during critical stages, our quartz wafer carriers are available for various wafer sizes and can be fully customized to meet your specific process requirements, ensuring optimal yield and performance.
Remarks：
- ayment method: By wire transfer or advance payment, depending on the quantity of the order.
- Delivery time: According to the order quantity.
- Transportation method: Sea freight or air freight, depending on the customer.
| Property Content | Property Values |
|---|---|
| SiO2 | 99.99% |
| Density | 2.2×10³ kg/cm³ |
| Hardness | 5.5 - 6.5 Mohs' Scale 570 KHN 100 |
| Tensile Strength | 4.8×10⁷ Pa (N/mm2) (7000 psi) |
| Compression Strength | >1.1×10⁹ Pa (160,000 psi) |
| Coefficient of Thermal Expansion | 5.5×10⁻⁷ cm/cm·°C (20°C-320°C) |
| Thermal Conductivity | 1.4 W/m·°C |
| Specific Heat | 670 J/kg·°C |
| Softening Point | 1730°C (3146°F) |
| Annealing Point | 1210°C (2210°F) |
| Strain Point | 1120°C (2048°F) |
| Work Temperature | 1200°C (2192°F) |
| Electrical Resistivity | 7×10⁷ ohm cm (350°C) |
| Size | Customized |
| Logo | Customized Logo Accept |
Ultra-High Purity & Contamination Control
Made from high-purity fused silica (quartz), these racks and carriers virtually eliminate the risk of metallic or particulate contamination to sensitive silicon wafers, which is critical for maintaining high yields in advanced semiconductor manufacturing processes.
Exceptional Chemical Corrosion Resistance:
Designed to withstand aggressive chemicals used in wet etching, cleaning, and rinsing processes (acids, bases, and solvents), ensuring long service life and consistent performance even in highly corrosive environments without degrading or contributing impurities.
Excellent Thermal Stability & Mechanical Integrity:
Quartz boasts a low coefficient of thermal expansion and high thermal resistance, allowing these carriers to maintain their structural integrity and precise dimensions even during rapid temperature changes or prolonged exposure to elevated temperatures common in wafer processing.
Precision Engineering & Customizability
Manufactured with tight tolerances and smooth surfaces to prevent wafer damage and ensure proper seating. Furthermore, they are fully customizable in terms of wafer size compatibility (e.g., 6″, 8″, 12″), slot configurations, and overall dimensions to seamlessly integrate into specific fab equipment and process requirements.
Application Scenario
Semiconductor Wafer Wet Cleaning & Etching
Primarily used in wet bench processes for holding and transporting silicon wafers through various cleaning solutions (e.g., RCA cleaning), chemical etching baths, and rinsing stages. The high purity quartz prevents contamination and resists aggressive chemicals.
Photolithography Development & Stripping
Essential for supporting wafers during the development of photoresist and subsequent stripping processes, where chemical resistance and precision alignment are crucial to avoid defects.
Wafer Rinsing, Drying & Storage
Facilitates thorough rinsing of wafers after chemical treatments, and can be used in drying processes (e.g., IPA vapor drying). They also serve as clean, protective storage for wafers between different fabrication steps within a cleanroom environment.
Automated Wafer Handling & Transport
Designed for integration with automated wafer handling systems (e.g., robotic arms), allowing for precise and safe transfer of fragile silicon wafers between different processing tools in high-volume manufacturing lines.
Handle with care
Quartz glass products are made from valuable materials and must be handled gently to avoid collisions and falls.
Regular maintenance
The maintenance of quartz tubes must be performed regularly to ensure their long-term stable performance. Regularly check the connections, fixings, and mechanical vibrations of the quartz tubes to prevent abnormalities. The exterior of the quartz tubes is prone to contamination from dust and moisture, so they should be cleaned regularly.
Storage environmen
When storing quartz tubes, care should be taken to avoid exposure to mechanical vibrations, shocks, and excessively high temperatures. They should be kept in a dry, cool, and well-ventilated place, avoiding direct sunlight and high-temperature environments.
Our quartz wafer cleaning racks and carriers are designed to accommodate a wide range of standard silicon wafer sizes, including 4-inch, 6-inch, 8-inch, and 12-inch wafers. We also offer comprehensive customization services to fabricate carriers for non-standard or specialty wafer dimensions and thicknesses to precisely fit your unique production requirements.
Quartz is an inherently smooth and hard material that is highly resistant to abrasion and chemical degradation, which significantly reduces particle shedding compared to other materials. Our manufacturing process ensures ultra-clean surfaces and designs with minimal trapping points, further preventing particle contamination during crucial wet processing and transport steps in semiconductor fabrication.
Absolutely. High-purity fused silica (quartz) offers exceptional chemical inertness and resistance to almost all acids (including HF at lower concentrations, nitric acid, sulfuric acid) and strong bases commonly employed in semiconductor wet processing. This robust chemical resistance ensures the long-term integrity of the carrier and prevents chemical leaching that could contaminate sensitive wafers.
Laser Drilling of Quartz
Threaded Quartz Tube
External Thread on Quartz Tube
Internal Threaded Quartz Tube
Quartz Tube Slotted
Window on Quartz Tube
Angled Cut Quartz Tube
Quartz Tile
Quartz Tube with Window
Frequently asked questions
We specialize in the end-to-end manufacturing of high-purity quartz glass components. Our core product lines include:
Quartz Tubing & Rods: A wide range of diameters and specifications.
Quartz Plates & Discs: Precision-cut and polished for optical and industrial use.
Quartz Labware: A full suite of standard and custom glassware, including beakers, flasks, and boats.
Semiconductor-Grade Quartz: High-purity components like process tubes and carriers for semiconductor fabrication.
Custom Fabricated Components: We can produce complex parts tailored to your unique designs and specifications.
Yes. Custom fabrication is at the core of our business. With over a decade of specialized experience, we partner with companies to provide expert OEM/ODM services. Our capabilities include welding, grinding, drilling, polishing, bending, and other precision processing techniques to create components that meet your exact requirements.
Quality is paramount in our manufacturing process. We are an ISO 9001:2015 certified manufacturer, ensuring that our processes meet international quality management standards.Our products also undergo rigorous SGS testing for purity and performance. We use high-purity raw materials (up to 99.998% SiO2) to produce fused quartz and fused silica products with exceptional thermal stability, high-temperature resistance, and chemical inertness.
We've streamlined our process to be as efficient as possible:
Submit Your RFQ: Send us your technical drawings, specifications, and requirements via our website contact form or email.
Rapid Response: You can expect an initial response within minutes and detailed communication within half an hour.
Design & Proposal: We will deliver a detailed design proposal and a competitive quote within 24 hours.
Prototyping & Production: Upon approval, we move swiftly from prototyping to full-scale production to meet your deadlines.
Partnering with Aoxin Quartz offers several key advantages:
Proven Expertise: With 10+ years in the industry, we have the technical knowledge to tackle complex challenges.
One-Stop Solution: We manage the entire production process, from sourcing high-purity raw materials to fabricating and finishing complex components.
Competitive Value: Located in a major quartz production hub, we leverage an efficient supply chain and advanced manufacturing to offer exceptional quality at a competitive price point.
Dedicated Partnership: Over 90% of our clients become long-term partners. We are committed to your success through responsive service, reliable quality, and innovative solutions.
