Quartz Tube
Quartz Plate
Quartz Rod
Optical Applications
Semiconductor Industry
Laboratory and Chemical Applications
Our quartz stages for furnace processing are precisely engineered from high-purity fused silica, offering unparalleled stability and cleanliness for demanding thermal treatments. Designed to withstand extreme temperatures while maintaining structural integrity, these stages are ideal for annealing, diffusion, sintering, and crystal growth applications. The non-contaminating quartz material ensures that your sensitive materials, such as semiconductor wafers or high-purity ceramics, are processed in an ultra-clean environment. Custom dimensions, grid patterns, and designs are available to perfectly integrate with your specific furnace systems and processing requirements.
Remarks：
- ayment method: By wire transfer or advance payment, depending on the quantity of the order.
- Delivery time: According to the order quantity.
- Transportation method: Sea freight or air freight, depending on the customer.
| Property Content | Property Values |
|---|---|
| SiO2 | 99.99% |
| Density | 2.2×10³ kg/cm³ |
| Hardness | 5.5 - 6.5 Mohs' Scale 570 KHN 100 |
| Tensile Strength | 4.8×10⁷ Pa (N/mm2) (7000 psi) |
| Compression Strength | >1.1×10⁹ Pa (160,000 psi) |
| Coefficient of Thermal Expansion | 5.5×10⁻⁷ cm/cm·°C (20°C-320°C) |
| Thermal Conductivity | 1.4 W/m·°C |
| Specific Heat | 670 J/kg·°C |
| Softening Point | 1730°C (3146°F) |
| Annealing Point | 1210°C (2210°F) |
| Strain Point | 1120°C (2048°F) |
| Work Temperature | 1200°C (2192°F) |
| Electrical Resistivity | 7×10⁷ ohm cm (350°C) |
| Size | Customized |
| Logo | Customized Logo Accept |
Exceptional High-Temperature Stability
Crafted from high-purity fused silica, these quartz stages maintain their structural integrity and flatness even under extreme and prolonged temperatures typical of furnaces, ensuring reliable support for materials during annealing, sintering, or diffusion processes.
Ultra-High Purity & Non-Contaminating
With inherent high purity, quartz material prevents the introduction of impurities or cross-contamination to sensitive processed materials, which is crucial for applications in semiconductor manufacturing, advanced ceramics, and other clean processes.
Excellent Chemical & Process Atmosphere Resistance
Quartz is highly inert to most aggressive chemicals and various process gases (e.g., oxidizing, reducing, inert atmospheres) at elevated temperatures. This ensures the stage’s longevity and prevents undesirable reactions with the processed materials.
Precision Design & Full Customization
These stages can be precisely fabricated with specific dimensions, grid patterns, and surface finishes to securely hold and separate various samples or components. The ability for full customization allows for perfect integration into diverse furnace systems and optimization for unique processing requirements.
Application Scenario
Semiconductor Wafer Processing
Crucial for supporting and separating silicon wafers or other semiconductor substrates during high-temperature processes like annealing, diffusion, oxidation, or thin-film deposition within diffusion and rapid thermal processing (RTP) furnaces, where ultra-high purity and thermal stability are paramount.
High-Temperature Material Heat Treatment
Ideal for holding and processing various materials such as ceramics, metals, or composites during sintering, calcination, or general heat treatment in industrial and laboratory furnaces, ensuring uniform heating and preventing contamination.
Crystal Growth & Epitaxial Deposition
Used as a stable platform for crucibles, seed crystals, or substrates in crystal growth furnaces (e.g., Czochralski, Bridgman) or epitaxial growth systems, where precise positioning and an inert, high-temperature environment are essential for material quality.
Laboratory & Research Furnace Applications
Provides a versatile and highly stable surface for supporting diverse samples and experimental setups within research furnaces, enabling controlled high-temperature reactions, material characterization, or specialized thermal processing in fields like materials science and chemical engineering.
Handle with care
Quartz glass products are made from valuable materials and must be handled gently to avoid collisions and falls.
Regular maintenance
The maintenance of quartz tubes must be performed regularly to ensure their long-term stable performance. Regularly check the connections, fixings, and mechanical vibrations of the quartz tubes to prevent abnormalities. The exterior of the quartz tubes is prone to contamination from dust and moisture, so they should be cleaned regularly.
Storage environmen
When storing quartz tubes, care should be taken to avoid exposure to mechanical vibrations, shocks, and excessively high temperatures. They should be kept in a dry, cool, and well-ventilated place, avoiding direct sunlight and high-temperature environments.
A quartz furnace stage is critical for maintaining material purity because quartz (fused silica) is an ultra-high purity material (typically ≥99.99% SiO2). Unlike metal or some ceramic stages, it will not leach undesirable metallic ions or other contaminants into sensitive materials (like semiconductor wafers) during high-temperature processing, ensuring the integrity and performance of the final product.
Key considerations include the maximum operating temperature of your furnace, the specific dimensions and number of materials/samples to be processed, the required grid or partition layout for separation, the type of furnace (e.g., tube, box), and any need for specific mounting features or gas flow characteristics. Providing detailed drawings or specifications of your furnace and process is highly recommended for optimal custom design.
Yes, quartz stages exhibit excellent resistance to thermal shock due to the extremely low coefficient of thermal expansion of fused silica. This property allows them to endure rapid heating and cooling cycles without cracking or deforming, making them highly durable and reliable for processes that involve frequent temperature changes or quick ramp-up/cool-down rates.
Laser Drilling of Quartz
Threaded Quartz Tube
External Thread on Quartz Tube
Internal Threaded Quartz Tube
Quartz Tube Slotted
Window on Quartz Tube
Angled Cut Quartz Tube
Quartz Tile
Quartz Tube with Window
Frequently asked questions
We specialize in the end-to-end manufacturing of high-purity quartz glass components. Our core product lines include:
Quartz Tubing & Rods: A wide range of diameters and specifications.
Quartz Plates & Discs: Precision-cut and polished for optical and industrial use.
Quartz Labware: A full suite of standard and custom glassware, including beakers, flasks, and boats.
Semiconductor-Grade Quartz: High-purity components like process tubes and carriers for semiconductor fabrication.
Custom Fabricated Components: We can produce complex parts tailored to your unique designs and specifications.
Yes. Custom fabrication is at the core of our business. With over a decade of specialized experience, we partner with companies to provide expert OEM/ODM services. Our capabilities include welding, grinding, drilling, polishing, bending, and other precision processing techniques to create components that meet your exact requirements.
Quality is paramount in our manufacturing process. We are an ISO 9001:2015 certified manufacturer, ensuring that our processes meet international quality management standards.Our products also undergo rigorous SGS testing for purity and performance. We use high-purity raw materials (up to 99.998% SiO2) to produce fused quartz and fused silica products with exceptional thermal stability, high-temperature resistance, and chemical inertness.
We've streamlined our process to be as efficient as possible:
Submit Your RFQ: Send us your technical drawings, specifications, and requirements via our website contact form or email.
Rapid Response: You can expect an initial response within minutes and detailed communication within half an hour.
Design & Proposal: We will deliver a detailed design proposal and a competitive quote within 24 hours.
Prototyping & Production: Upon approval, we move swiftly from prototyping to full-scale production to meet your deadlines.
Partnering with Aoxin Quartz offers several key advantages:
Proven Expertise: With 10+ years in the industry, we have the technical knowledge to tackle complex challenges.
One-Stop Solution: We manage the entire production process, from sourcing high-purity raw materials to fabricating and finishing complex components.
Competitive Value: Located in a major quartz production hub, we leverage an efficient supply chain and advanced manufacturing to offer exceptional quality at a competitive price point.
Dedicated Partnership: Over 90% of our clients become long-term partners. We are committed to your success through responsive service, reliable quality, and innovative solutions.
