Quartz boats, a commonly used piece of equipment in laboratory and industrial production, offer a range of excellent properties and diverse applications.
Property Content | Property Values |
---|---|
SiO2 | 99.99% |
Density | 2.2×10³ kg/cm³ |
Hardness | 5.5 - 6.5 Mohs' Scale 570 KHN 100 |
Tensile Strength | 4.8×10⁷ Pa (N/mm2) (7000 psi) |
Compression Strength | >1.1×10⁹ Pa (160,000 psi) |
Coefficient of Thermal Expansion | 5.5×10⁻⁷ cm/cm·°C (20°C-320°C) |
Thermal Conductivity | 1.4 W/m·°C |
Specific Heat | 670 J/kg·°C |
Softening Point | 1730°C (3146°F) |
Annealing Point | 1210°C (2210°F) |
Strain Point | 1120°C (2048°F) |
Work Temperature | 1200°C (2192°F) |
Electrical Resistivity | 7×10⁷ ohm cm (350°C) |
Size | Customized |
Logo | Customized Logo Accept |
Main Composition
Quartz boats are primarily made of high-purity quartz glass, with silicon dioxide (SiO2) as its main component. This material exhibits unique physical and chemical properties.
High-Temperature Resistance
Quartz glass has exceptional high-temperature resistance, maintaining stability and resisting deformation or melting even in high-temperature environments. This makes quartz boats ideal for high-temperature processing.
Chemical Stability
Quartz glass possesses excellent chemical resistance to various substances, including acids and bases. This characteristic enables quartz boats to carry corrosive liquids and gases in chemical experiments.
Light Transmission
QQuartz glass provides good light transmission, allowing light to penetrate. This is highly useful in applications where it is necessary to observe internal reactions or conduct optical experiments.
Application Scenario
A quartz boat is a high-temperature processing container used in semiconductor manufacturing. It is typically made of high-purity quartz glass and serves to hold silicon wafers during high-temperature processing.
When using a quartz boat, precautions regarding high-temperature safety, chemical corrosion protection, and adherence to operating procedures must be followed to ensure the safety of personnel and the normal functioning of the equipment.
Quartz boats can be customized to fit various silicon wafer sizes, ensuring the stability and safety of the wafers during high-temperature processing.
Frequently asked questions
Quartz glass is a hard and brittle material with excellent physical and chemical properties, extremely high mechanical hardness, good electrical insulation, high temperature and corrosion resistance, low and stable delay performance, good light transmittance, etc. It is widely used in semiconductors, optics, electricity, chemistry, aerospace, automobiles and other fields. Hard and brittle materials are difficult to process, and many fields urgently need cutting processes with small edge collapse, less material loss, low cross-section roughness, and a wide cutting thickness range. The traditional cutting method of quartz glass is mechanical cutting, that is, wheel cutting. Non-traditional cutting methods include water jet cutting, electrochemical discharge wire cutting, continuous laser cutting, etc. Mechanical cutting has low cost, but the contact between the wheel and the material causes large tool wear, and the material is easily contaminated by the tool. Quartz glass is prone to edge collapse, microcracks, and residual stress, which affects the strength and performance of the material! It is difficult to achieve curve cutting and requires post-processing, such as grinding and polishing. Laser cutting does not directly contact the material, has no contact stress, and can perform complex curve cutting. Picosecond laser has the advantages of small spot diameter, high precision, short action time with the material, and small action area, and is suitable for the processing of hard and brittle materials.
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