Quartz Tube
Quartz Plate
Quartz Rod
Optical Applications
Semiconductor Industry
Laboratory and Chemical Applications
Our high-purity quartz wafer annealing boats are indispensable for critical thermal processes in semiconductor manufacturing, including diffusion, oxidation, and annealing. Crafted from premium fused silica, these slotted boats offer exceptional temperature stability at extreme furnace temperatures, ultra-low particle generation, and superior chemical inertness to prevent contamination of delicate silicon wafers. Designed for precise wafer positioning and optimal gas flow, we provide a wide range of standard and custom configurations to seamlessly integrate into your specific furnace systems and process requirements.
Remarks：
- ayment method: By wire transfer or advance payment, depending on the quantity of the order.
- Delivery time: According to the order quantity.
- Transportation method: Sea freight or air freight, depending on the customer.
| Property Content | Property Values |
|---|---|
| SiO2 | 99.99% |
| Density | 2.2×10³ kg/cm³ |
| Hardness | 5.5 - 6.5 Mohs' Scale 570 KHN 100 |
| Tensile Strength | 4.8×10⁷ Pa (N/mm2) (7000 psi) |
| Compression Strength | >1.1×10⁹ Pa (160,000 psi) |
| Coefficient of Thermal Expansion | 5.5×10⁻⁷ cm/cm·°C (20°C-320°C) |
| Thermal Conductivity | 1.4 W/m·°C |
| Specific Heat | 670 J/kg·°C |
| Softening Point | 1730°C (3146°F) |
| Annealing Point | 1210°C (2210°F) |
| Strain Point | 1120°C (2048°F) |
| Work Temperature | 1200°C (2192°F) |
| Electrical Resistivity | 7×10⁷ ohm cm (350°C) |
| Size | Customized |
| Logo | Customized Logo Accept |
Extreme High-Temperature Stability & Resistance
Constructed from high-purity fused silica, these boats can withstand the intense, prolonged temperatures common in semiconductor furnace processes (e.g., annealing, diffusion, oxidation) without warping, devitrifying, or outgassing, ensuring consistent and reliable thermal treatment.
Ultra-Low Contamination & High Purity
The inherent high purity of quartz (SiO2 ≥ 99.99%) combined with advanced manufacturing techniques ensures minimal trace element impurities and particle generation. This is critical for preventing contamination of delicate silicon wafers, which directly impacts device yield and performance in microelectronics.
Excellent Thermal Shock Resistance
Quartz’s extremely low coefficient of thermal expansion enables these boats to endure rapid heating and cooling cycles within furnace environments without cracking or stress, leading to a longer lifespan and reduced downtime.
Precision Slotted Design & Customizability
The precisely engineered slots ensure secure and accurate positioning of wafers, optimizing gas flow and temperature uniformity during processing. Furthermore, these boats are fully customizable in terms of wafer size (e.g., 6″, 8″, 12″), slot count, pitch, and overall dimensions to seamlessly integrate with specific furnace configurations and process requirements.
Application Scenario
Semiconductor Wafer Diffusion Processes
Used extensively in diffusion furnaces for precisely holding silicon wafers during the introduction of dopants (like boron or phosphorus) at high temperatures, ensuring uniform doping profiles across the wafer.
Wafer Oxidation Processes
Essential for growing thin layers of silicon dioxide (SiO2) on wafers in oxidation furnaces. The quartz boat maintains wafer integrity and spacing, allowing for uniform oxide growth critical for device insulation.
High-Temperature Wafer Annealing
Employed in annealing furnaces to repair crystal lattice damage, activate implanted dopants, or relieve stress in wafers after various fabrication steps, all performed at elevated temperatures.
Low-Pressure Chemical Vapor Deposition (LPCVD)
Critical for supporting wafers during the deposition of various thin films (e.g., polysilicon, silicon nitride, silicon dioxide) in LPCVD furnaces, where the boat’s high purity and temperature stability prevent contamination and ensure uniform film thickness.
Handle with care
Quartz glass products are made from valuable materials and must be handled gently to avoid collisions and falls.
Regular maintenance
The maintenance of quartz tubes must be performed regularly to ensure their long-term stable performance. Regularly check the connections, fixings, and mechanical vibrations of the quartz tubes to prevent abnormalities. The exterior of the quartz tubes is prone to contamination from dust and moisture, so they should be cleaned regularly.
Storage environmen
When storing quartz tubes, care should be taken to avoid exposure to mechanical vibrations, shocks, and excessively high temperatures. They should be kept in a dry, cool, and well-ventilated place, avoiding direct sunlight and high-temperature environments.
Yes, our quartz wafer annealing boats are meticulously designed with precise dimensions and robust construction to ensure seamless integration with most standard automated furnace loading and unloading systems, including cantilever and paddle mechanisms. This allows for efficient and reliable wafer transfer in high-volume semiconductor manufacturing environments.
The lifespan of a quartz wafer boat varies depending on specific process parameters like temperature, cycle frequency, and chemical exposure. However, with proper handling and routine maintenance, they can last for many years. Regular cleaning (e.g., using dilute hydrofluoric acid or other appropriate etchants) is essential to remove deposited films and prevent devitrification, which can significantly extend their operational life and maintain process integrity.
The precision-machined slots and overall open framework of the quartz boat are specifically designed to allow for optimal and uniform gas flow around each wafer. This ensures consistent temperature distribution across all wafers within the boat and throughout the furnace tube, which is critical for achieving uniform film deposition, doping profiles, and overall process repeatability during high-temperature thermal treatments like diffusion and oxidation.
Laser Drilling of Quartz
Threaded Quartz Tube
External Thread on Quartz Tube
Internal Threaded Quartz Tube
Quartz Tube Slotted
Window on Quartz Tube
Angled Cut Quartz Tube
Quartz Tile
Quartz Tube with Window
Frequently asked questions
We specialize in the end-to-end manufacturing of high-purity quartz glass components. Our core product lines include:
Quartz Tubing & Rods: A wide range of diameters and specifications.
Quartz Plates & Discs: Precision-cut and polished for optical and industrial use.
Quartz Labware: A full suite of standard and custom glassware, including beakers, flasks, and boats.
Semiconductor-Grade Quartz: High-purity components like process tubes and carriers for semiconductor fabrication.
Custom Fabricated Components: We can produce complex parts tailored to your unique designs and specifications.
Yes. Custom fabrication is at the core of our business. With over a decade of specialized experience, we partner with companies to provide expert OEM/ODM services. Our capabilities include welding, grinding, drilling, polishing, bending, and other precision processing techniques to create components that meet your exact requirements.
Quality is paramount in our manufacturing process. We are an ISO 9001:2015 certified manufacturer, ensuring that our processes meet international quality management standards.Our products also undergo rigorous SGS testing for purity and performance. We use high-purity raw materials (up to 99.998% SiO2) to produce fused quartz and fused silica products with exceptional thermal stability, high-temperature resistance, and chemical inertness.
We've streamlined our process to be as efficient as possible:
Submit Your RFQ: Send us your technical drawings, specifications, and requirements via our website contact form or email.
Rapid Response: You can expect an initial response within minutes and detailed communication within half an hour.
Design & Proposal: We will deliver a detailed design proposal and a competitive quote within 24 hours.
Prototyping & Production: Upon approval, we move swiftly from prototyping to full-scale production to meet your deadlines.
Partnering with Aoxin Quartz offers several key advantages:
Proven Expertise: With 10+ years in the industry, we have the technical knowledge to tackle complex challenges.
One-Stop Solution: We manage the entire production process, from sourcing high-purity raw materials to fabricating and finishing complex components.
Competitive Value: Located in a major quartz production hub, we leverage an efficient supply chain and advanced manufacturing to offer exceptional quality at a competitive price point.
Dedicated Partnership: Over 90% of our clients become long-term partners. We are committed to your success through responsive service, reliable quality, and innovative solutions.
