Quartz Tube
Quartz Plate
Quartz Rod
Optical Applications
Semiconductor Industry
Laboratory and Chemical Applications
Our high-purity slotted quartz boats and carrier trays are meticulously engineered from fused silica, providing an ultra-clean and resilient solution for critical processing applications. Designed to safely hold multiple wafers or delicate samples, these boats are indispensable for high-temperature annealing, chemical etching, wet cleaning, and other batch processes in semiconductor, photovoltaic, and advanced materials industries. Their exceptional purity ensures zero contamination, while the robust slotted design facilitates uniform processing and easy handling of sensitive components. Fully customizable to meet precise dimensions and specific process requirements.
Remarks：
- ayment method: By wire transfer or advance payment, depending on the quantity of the order.
- Delivery time: According to the order quantity.
- Transportation method: Sea freight or air freight, depending on the customer.
| Property Content | Property Values |
|---|---|
| SiO2 | 99.99% |
| Density | 2.2×10³ kg/cm³ |
| Hardness | 5.5 - 6.5 Mohs' Scale 570 KHN 100 |
| Tensile Strength | 4.8×10⁷ Pa (N/mm2) (7000 psi) |
| Compression Strength | >1.1×10⁹ Pa (160,000 psi) |
| Coefficient of Thermal Expansion | 5.5×10⁻⁷ cm/cm·°C (20°C-320°C) |
| Thermal Conductivity | 1.4 W/m·°C |
| Specific Heat | 670 J/kg·°C |
| Softening Point | 1730°C (3146°F) |
| Annealing Point | 1210°C (2210°F) |
| Strain Point | 1120°C (2048°F) |
| Work Temperature | 1200°C (2192°F) |
| Electrical Resistivity | 7×10⁷ ohm cm (350°C) |
| Size | Customized |
| Logo | Customized Logo Accept |
Ultimate Purity & Zero Contamination
Crafted from high-purity fused silica, these slotted quartz boats and carriers are virtually free of impurities, ensuring no metal ion leaching or particulate contamination. This is paramount for processing sensitive materials like semiconductor wafers, where even trace contaminants can compromise device performance.
Exceptional High-Temperature & Chemical Resistance
Designed to withstand extreme temperatures (e.g., typical furnace processing temperatures) and highly corrosive chemical environments (acids, alkalis, reactive gases), these quartzware products offer unparalleled durability and longevity compared to other materials, ensuring stable performance in harsh conditions.
Precision Slotting for Uniform Processing
The meticulously engineered slots ensure precise and consistent spacing for individual wafers or samples. This allows for uniform exposure to process gases, etchants, or cleaning solutions, leading to highly reproducible results across batch processing.
Robust Construction & Customizability for Specific Needs
Built with strong, clear quartz glass, these carriers are highly durable and resistant to thermal shock. Furthermore, their design is fully customizable in terms of dimensions, slot count, slot geometry, and overall structure, allowing them to perfectly integrate into existing equipment and fulfill unique process requirements.
Application Scenario
Semiconductor Wafer Processing
Indispensable for holding and transferring silicon wafers during critical fabrication steps such as high-temperature annealing, diffusion, oxidation, and chemical vapor deposition (CVD) in tube furnaces, ensuring precise positioning and preventing contamination.
Photovoltaic (Solar Cell) Manufacturing
Used in the production of solar cells for processes like annealing of silicon wafers or thin-film deposition, where maintaining high purity and uniform processing across multiple substrates is crucial for cell efficiency.
Wet Chemical Processing and Etching
Employed in wet benches for holding and immersing multiple delicate components or wafers in corrosive acids or cleaning solutions, providing excellent chemical resistance and allowing for uniform liquid exposure.
Advanced Materials Research & Production
Applied in research laboratories and industrial facilities for the batch processing, annealing, or heat treatment of various advanced materials, thin films, or precision components that require high-temperature stability, chemical inertness, and a contamination-free environment.
Handle with care
Quartz glass products are made from valuable materials and must be handled gently to avoid collisions and falls.
Regular maintenance
The maintenance of quartz tubes must be performed regularly to ensure their long-term stable performance. Regularly check the connections, fixings, and mechanical vibrations of the quartz tubes to prevent abnormalities. The exterior of the quartz tubes is prone to contamination from dust and moisture, so they should be cleaned regularly.
Storage environmen
When storing quartz tubes, care should be taken to avoid exposure to mechanical vibrations, shocks, and excessively high temperatures. They should be kept in a dry, cool, and well-ventilated place, avoiding direct sunlight and high-temperature environments.
Our slotted quartz boats and carriers are highly customizable. To ensure a perfect fit, we require detailed specifications of your existing equipment, including internal dimensions of your furnaces, processing tanks, or any relevant component. Providing blueprints or precise measurements of your wafers/samples and current carriers will allow us to design and fabricate a quartz solution that integrates seamlessly.
Yes, absolutely. High-purity fused silica (quartz) exhibits exceptional resistance to most acids (including hydrofluoric acid at lower concentrations and temperatures) and bases, as well as many organic solvents. This makes these carriers ideal for demanding wet chemical etching, cleaning, and diffusion processes where chemical inertness is critical to prevent contamination and ensure carrier longevity.
Slotted quartz boats offer significant advantages for batch processing by providing precise, consistent spacing for multiple wafers or samples. This ensures uniform exposure to process gases or liquids, leading to more reproducible results and improved yield. Additionally, the integrated design simplifies handling, loading, and unloading of multiple delicate components, improving overall process efficiency and reducing the risk of damage.
Laser Drilling of Quartz
Threaded Quartz Tube
External Thread on Quartz Tube
Internal Threaded Quartz Tube
Quartz Tube Slotted
Window on Quartz Tube
Angled Cut Quartz Tube
Quartz Tile
Quartz Tube with Window
Frequently asked questions
We specialize in the end-to-end manufacturing of high-purity quartz glass components. Our core product lines include:
Quartz Tubing & Rods: A wide range of diameters and specifications.
Quartz Plates & Discs: Precision-cut and polished for optical and industrial use.
Quartz Labware: A full suite of standard and custom glassware, including beakers, flasks, and boats.
Semiconductor-Grade Quartz: High-purity components like process tubes and carriers for semiconductor fabrication.
Custom Fabricated Components: We can produce complex parts tailored to your unique designs and specifications.
Yes. Custom fabrication is at the core of our business. With over a decade of specialized experience, we partner with companies to provide expert OEM/ODM services. Our capabilities include welding, grinding, drilling, polishing, bending, and other precision processing techniques to create components that meet your exact requirements.
Quality is paramount in our manufacturing process. We are an ISO 9001:2015 certified manufacturer, ensuring that our processes meet international quality management standards.Our products also undergo rigorous SGS testing for purity and performance. We use high-purity raw materials (up to 99.998% SiO2) to produce fused quartz and fused silica products with exceptional thermal stability, high-temperature resistance, and chemical inertness.
We've streamlined our process to be as efficient as possible:
Submit Your RFQ: Send us your technical drawings, specifications, and requirements via our website contact form or email.
Rapid Response: You can expect an initial response within minutes and detailed communication within half an hour.
Design & Proposal: We will deliver a detailed design proposal and a competitive quote within 24 hours.
Prototyping & Production: Upon approval, we move swiftly from prototyping to full-scale production to meet your deadlines.
Partnering with Aoxin Quartz offers several key advantages:
Proven Expertise: With 10+ years in the industry, we have the technical knowledge to tackle complex challenges.
One-Stop Solution: We manage the entire production process, from sourcing high-purity raw materials to fabricating and finishing complex components.
Competitive Value: Located in a major quartz production hub, we leverage an efficient supply chain and advanced manufacturing to offer exceptional quality at a competitive price point.
Dedicated Partnership: Over 90% of our clients become long-term partners. We are committed to your success through responsive service, reliable quality, and innovative solutions.
